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GateKeeper® Gas Purifiers

Removal of gaseous contaminants down to part-per-trillion levels with inorganic media

Entegris GateKeeper® gas purifiers remove gaseous contaminants down to part-per-trillion levels with inorganic media. GateKeeper purifiers are a cost-effective way to prevent contamination of the process or damage to the tool.

 

Designed for ambient operation and requiring no power, GateKeeper gas purifiers offer maximum flow rates ranging from 1 SLM to 20,000 SLM. Applications include gas-box installation, single-tool purification, multi-tool purification, facility purification, back-pad purifiers, Aeronex® gas purification system back-ups and other applications.

 

Regenerable GateKeeper gas purifiers are an environmentally friendly alternative to non-regenerable getter, organometallic resin and palladium based technologies.
GateKeeper® Carbon Monoxide Gas Purifiers
Cost-effective gas purification
  • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
  • Consistently delivers ultrapure gas
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • Low pressure drop across purifiers
GateKeeper® Corrosive Gas Purifiers
Cost-effective gas purification
  • Consistently delivers ultrapure gas
  • Designed for use with HCl, Cl2, HBr, BCl3, SiCl4 and SiF4. The purifiers remove moisture to <1 ppb (part-per-billion) in N2.
  • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • Low pressure drop across purifiers
GateKeeper® Hydride Gas Purifiers
Cost-effective, environmentally friendly gas purification
  • Designed for use with NH3, AsH3, PH3, SiH 4, and GeH4. The purifiers remove O2, CO2, H2O and oxidation byproducts to sub-ppb (part-per-billion) levels.
  • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • Low pressure drop across purifiers
GateKeeper® Hydrogen Gas Purifiers
Cost-effective, environmentally friendly gas purification
  • Consistently delivers ultrapure gas
  • Designed for use with H2 and H2/inert gas mixtures
  • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • Low pressure drop across purifiers
GateKeeper® Inert Gas Purifiers
Cost-effective, environmentally friendly gas purification
  • Consistently delivers ultrapure gas
  • Designed for use with N2, He, Ne, Kr, Xe, Ar, halocarbons and light hydrocarbons. The purifiers remove O2, H2, CO, CO2 and H2O to sub-ppb (part-per-billion) levels; SO2 to sub-ppt (part-per-trillion) levels.
  • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • Low pressure drop across purifiers
GateKeeper® Nonreactive Gas Purifiers
Cost-effective, environmentally friendly gas purification
  • Consistently delivers ultrapure gas
  • Designed for use with SF6, O2 , N2 O and O2 /inert gas mixtures. The purifiers remove CO2 and H2 O to sub-ppb (part-per-billion) levels; NMHCs to sub-ppt (part-per-trillion) levels.
  • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • Low pressure drop across purifiers
GateKeeper® Optics Gas Purifiers
Cost-effective, environmentally friendly gas purification
  • Consistently delivers ultrapure gas
  • Designed for use with CDA (clean dry air)
  • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • Low pressure drop across purifiers
GateKeeper® 200M Bulk Gas Purifiers
High-flow gas purification
  • Consistently delivers ultrapure gas
  • Designed for use with CDA or inert gases
  • Guards against impurity spikes from liquid storage tanks and inconsistent supply gas quality
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • High-flow gas purification