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ProcessGard® Filters

For use in prefiltration of DI Water and process chemistries

 

ProcessGard® liquid filters are designed for prefiltration of DI Water and other process chemistries in semiconductor and flat panel display applications. With polypropylene membrane and PTFE*, Processgard filters are used for semiconductor, flat panel display and data storage applications.

* For Industrial Use Only.  Not for use in food, drug, cosmetic or medical devices manufacturing, processing or packaging operations
ProcessGard® CJ Cartridge Filters
For prefiltration of DI water and chemicals
  • Recommended for prefiltration of various solutions to deliver long life performance
  • Available in a wide range of retention ratings (0.5 μm to 100 μm) and in filter lengths from 10” to 30” to suit specific application requirements
  • Made of polypropylene or cotton
  • Polypropylene supports provide clean and durable performance
ProcessGard® CN Cartridge Filters
Surface filter with precise retention efficiency for clarification and prefiltration applications
  • Used in clarification and prefiltration applications
  • Efficiently removes silica particles, carbon fines, resin fines, and other particulates and microorganisms from liquids and gases
  • All polypropylene construction offers excellent chemical and heat resistance
  • Heat-bonded, continuous fiber polypropylene media provides exceptional throughput and outstanding separation performance
  • Minimizes extractables and virtually eliminates problems associated with particle unloading and media migration
ProcessGard® CNE Cartridge Filters
Ideal for prefiltration of DI water
  • For DI water prefiltration at bulk and recirculation baths
  • Polybutylene telephathalate medium provides high particle removal efficiency
  • Depth filter structure with superior particle holding capability ensures long life over non-depth filters
  • Polypropelene supports provide clean and durable performance
ProcessGard® CR Cartridge Filters
Depth filter with broad range of retention efficiency ideal for filtration of liquids and solvents
  • Depth filter design provides good flow rate with long filtration life
  • Graded density polypropylene medium provides exceptional throughput and long service life.
  • Durable, all-polypropylene construction for excellent chemical and heat resistance
  • Good retention of colloids and particles ensuring low particle counts in bulk DI water and chemical production
ProcessGard® NP Cartridge Filters
Depth filters with high flow and excellent broad range retention efficiency, ideal for flat panel display prefiltering and semiconductor Bulk CMP filtration applications
  • Multi-stage, graded density design delivers superior particle and gel holding capability
  • Superior retention of colloids and particles ensuring low particle counts to protect your process
  • Polypropylene construction offers excellent chemical and heat resistance (polypropylene and glass fibers are used for 0.5 μm and 1.0 μm filters)
  • A full range of retention ratings with high retention efficiency lets you optimize for your specific process stream
  • Applications include wet etching, stripping, developer, cleaning
ProcessGard® PES Cartridge and Disposable Filters
PES filters for weak acids, bases and DI water filtration
  • Asymmetric PES structure provides longer life-time and high flow rate
  • Hydrophilic PES media eliminates prewetting treatment, reduces filter changeout time and increases equipment uptime
  • Various retention ratings, fitting sizes and types to meet various requirements
ProcessGard® PP Cartridge and Disposable Filters
Polypropylene filters for acids, bases, process water, solvents, dyes and lacquers
  • Broad chemical and thermal compatibility
  • Highly customized configurations available to meet application and customer needs
  • Various retention ratings, fitting sizes and types to meet various requirements