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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

AluMax™ Coating

Alumina coating for high temperature aerospace, data storage and semiconductor applications

This is a dense, strongly adherent and amorphous alumina coating applied using reactive DC pulsed magnetron sputtering. It is ideal for protecting metal and alloy components against high temperature oxidation. Because of its amorphous nature—from room temperature to above 1000°C—and because of its microstructure stability at elevated temperatures, the coating is suitable for high temperature applications such as a bond coat for thermal barrier coating (TBC) systems for the protection of hot gas components. It is also suitable for semiconductor equipment.

General features:

Oxidation resistant to 1100°C

Applications:

High temperature oxidation protection of superalloys
TBCs for hot-gas path components of gas turbines
Semiconductor equipment