Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)
Entegris uses its innovative low temperature vacuum plasma process to deposit a series of Silicon Nitride coatings for various industrial applications, including semiconductor equipment OEMs. The coating is also suitable for high-temperature oxidation/corrosion protection of ceramic materials.
General features:
Applications: