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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

DustFree™ Ultrapure Silicon Coating

PECVD coating for semiconductor equipment and aerospace applications

Dense, high-purity, strongly adherant, conformal coating of ultrpure silicon with excellent suface smoothness is deposited with Entegris' proprietary coating technologies.

 

Excellent adhesion and compliance on a wide variety of substrates lead to dust-free parts that can be wiped clean with solvents and cleaners as necessary.