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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Ultrapure Silicon Coating

Dense, high performance, strongly-adherent, conformal coating of silicon

The dense, high performance, strongly-adherent, conformal coating of silicon with excellent surface smoothness is deposited using Entegris' proprietary technology. Excellent adhesion and compliance on a wide variety of substrates lead to totally dust free parts that can be wipe-cleaned with solvents and cleaners as necessary.

 

General features:

  • Ultrapure Si
  • Low residual stress
  • Dense, hard and micro-conformal

 

Applications:

  • Wafer processing
  • Precision optics