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Processgard® Filters

For use in prefiltration of DI Water and process chemistries

Developed from Mykrolis® contamination control technologies, Processgard® liquid filters are designed for prefiltration of DI Water and other process chemistries in semiconductor and flat panel display applications.  With all polypropylene membrane and construction, Processgard filters are used for semiconductor, flat panel display and data storage applications.
Processgard CJ Cartridge Filters
For prefiltration of DI water and chemicals
  • Recommended for prefiltration of various solutions to deliver long life performance
  • Available in a wide range of retention ratings (0.5 μm to 100 μm) and in filter lengths from 10” to 30” to suit specific application requirements
  • Made of polypropylene or cotton
  • Polypropylene supports provide clean and durable performance
Processgard CN Cartridge Filters
Surface filter with precise retention efficiency for clarification and prefiltration applications
  • Used in clarification and prefiltration applications
  • Efficiently removes silica particles, carbon fines, resin fines, and other particulates and microorganisms from liquids and gases
  • All polypropylene construction offers excellent chemical and heat resistance
  • Heat-bonded, continuous fiber polypropylene media provides exceptional throughput and outstanding separation performance
  • Minimizes extractables and virtually eliminates problems associated with particle unloading and media migration
Processgard CNE Cartridge Filters
Ideal for prefiltration of DI water
  • For DI water prefiltration at bulk and recirculation baths
  • Polybutylene telephathalate medium provides high particle removal efficiency
  • Depth filter structure with superior particle holding capability ensures long life over non-depth filters
  • Polypropelene supports provide clean and durable performance
Processgard CR Cartridge Filters
Depth filter with broad range of retention efficiency ideal for filtration of liquids and solvents
  • Depth filter design provides good flow rate with long filtration life
  • Graded density polypropylene medium provides exceptional throughput and long service life.
  • Durable, all-polypropylene construction for excellent chemical and heat resistance
  • Good retention of colloids and particles ensuring low particle counts in bulk DI water and chemical production
Processgard NP Cartridge Filters
Depth filters with high flow and excellent broad range retention efficiency, ideal for flat panel display prefiltering and semiconductor Bulk CMP filtration applications
  • Multi-stage, graded density design delivers superior particle and gel holding capability
  • Superior retention of colloids and particles ensuring low particle counts to protect your process
  • Polypropylene construction offers excellent chemical and heat resistance (polypropylene and glass fibers are used for 0.5 μm and 1.0 μm filters)
  • A full range of retention ratings with high retention efficiency lets you optimize for your specific process stream
  • Applications include wet etching, stripping, developer, cleaning