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Processgard® Filters

Depth filter with high flow and excellent retention efficiency

Developed from Mykrolis® contamination control technologies, Processgard® liquid filters are designed for prefiltration of DI Water and other process chemistries in semiconductor and flat panel display applications. With all polypropylene membrane and construction, Processgard filters are used for semiconductor, flat panel display and data storage applications.
Processgard NP Cartridge Filters
Depth filters with high flow and excellent broad range retention efficiency, ideal for flat panel display prefiltering and semiconductor Bulk CMP filtration applications
  • Multi-stage, graded density design delivers superior particle and gel holding capability
  • Superior retention of colloids and particles ensuring low particle counts to protect your process
  • Polypropylene construction offers excellent chemical and heat resistance (polypropylene and glass fibers are used for 0.5 μm and 1.0 μm filters)
  • A full range of retention ratings with high retention efficiency lets you optimize for your specific process stream
  • Applications include wet etching, stripping, developer, cleaning