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QuickChange® Filters

Nondewetting PTFE filters
Developed from the Mykrolis® family of technologies, QuickChange® filters are optimized for use in chemical systems where the risk of particle contamination cannot be tolerated. Entegris' nondewetting filter membrane delivers Enabling Yield® performance by providing consistent retention properties. In addition, QuickChange technology is proven to retain its nondewetting properties when chemical baths are drained or purged. Consequently, bath-operation-stability is maintained because risk of filter dewetting in out-gassing chemistries is eliminated. The proven reliability of QuickChange filters also features reductions in filter change-out time and cost of ownership.
QuickChange ATE Filters
The proven high-flow solution for critical aqueous chemistry filtration
  • ATE membrane technology delivers high flow and superior retention performance
  • Increased membrane area for higher flow at 30nm retention rating for rapid bath cleanups
  • Nondewetting PTFE membrane technology eliminates the need for prewetting and flushing cycles
  • Recommended for use with aqueous-based chemicals at ambient temperatures (including H2SO4, H2PO4, HNO3, HF, HCl, BOE, NH4F, H2O2, TMAH, NH4OH and ozonated water) and elevated temperature applications (including SC1, SC2, SPM nitride etch, metal etch and various other organic-resist strippers).
  • Field proven reliability developed from the Mykrolis® contamination control technologies
QuickChange ATM Filters
Advanced nondewetting membrane technology in a high-flow, long-life prewet filter
  • Unique membrane prevents dewetting in air, during installation or chemical dumps/drains and outgassing chemistries
  • Nondewetting PTFE membrane filter, prewet and packaged in ultrapure DI water
  • Designed for use in any aqueous-based chemical
  • High membrane surface area
QuickChange AT Filters
Nondewetting membrane technology in a prewet filter that delivers rapid changeout and improved operating efficiency
  • Nondewetting PTFE membrane filter, prewet and packaged in ultrapure DI water
  • Unique patented membrane prevents dewetting in air, during installation or chemical dumps/drains, and outgassing chemistries
  • Designed for use in any aqueous-based chemical
QuickChange ATX Filters
Higher membrane area nondewetting PTFE membrane filter for aqueous chemistries
  • Nondewetting PTFE membrane filter, prewet and packaged in ultrapure DI water
  • Unique patented membrane prevents dewetting in air, during installation or chemical dumps/drains and outgassing chemistries
  • Designed for use in any aqueous-based chemical
  • Available in 4” and 10” cartridge with high membrane area available in 4” and 10” cartridge with high membrane area
QuickChange Plus Filters
Low-profile nondewetting PTFE membrane filter
  • Optimized for aggressive chemicals like SC1, SC2, SPM and all hot temperature chemicals
  • Highest retention rating with capability down to 30 nm
  • Unmatched purity and safety ideal for critical applications
QuickChange UCM Filter
Ultra Clean nondewetting PTFE membrane filters providing unparalleled cleanliness for metallic and ionic extractables
  • Ultra-low metallic and ionic extractable levels
  • Nondewetting PTFE membrane filter prewet and packaged in ultrapure DI water
  • Recommended for aqueous-based chemicals at ambient temperatures (including H2SO4, H3PO4, HNO3, HF, HCl, BOE, NH4F, H2O2, TMAH, NH4OH, and ozonated water) and elevated temperature applications (including SC1, SC2, piranha etch, nitride etch and metal etch)