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In-line Metal Gas Filter

For high-pressure, high-temperature applications
Filter Compatibility Guide (135617)

 

Nickel or stainless steel membrane with stainless steel housing - for high-pressure, high-temperature applications
Wafergard® III NF Micro In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
Wafergard® III NF Mini XL In-Line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
  • Typically used for flows up to 120 SLPM
Wafergard® III NF-75 In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
  • Typically used for flows up to 75 SLPM
Wafergard® III NF-30 In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
  • Typically used for flows up to 30 SLPM
Wafergard® II F Micro In-line Gas Filter
All-stainless steel gas filters for ultra-high purity gas filtration
  • Optimized high flow and high-retention 316L stainless steel filter element with 3x flow rate and 3-digit retention efficiency improvement over filter element
  • Standard size - ease of installation without design changes of gas panel or delivery system
  • All 316L stainless steel construction
  • Filter of choice for high-purity gas systems
  • Excellent gas compatibility with most semiconductor gases
  • Ideal for high-termperature and dynamic pressure applications
Wafergard® II SF Mini XL In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Patented stainless steel membrane provide high-efficiency filtration
  • Ideal for high-temperature and dynamic-pressure applications
  • Excellent compatibility with most ultrapure semiconductor process gases
  • For use with inert and reactive gases
  • Typical use up to 60 SLPM
Gasketgard® In-line Gasket Filters
VCR® gasket replacement protects sensitive gas components
  • Compact, all-metal filter that fits in place of standard 1⁄4" VCR® gaskets
  • Protects critical components from particle damage
  • Ideal for high-pressure and high-temperature applications
  • An economical safeguard against contamination
Linegard™ Micro In-Line Gas Filters
Economical safeguard for system components
  • Compact in-line gas filter made of 100% SUS316L
  • Removes 0.2 μm particles to protect sensitive gas components
  • Economical safeguard against contamination
  • Ideal for high-temperature and pulsing applications