Home > Industries > Compound Semiconductor (LED) > Filtration > In-line Teflon® Gas Filter

Industries

Select one or more of the following fields in order to begin your search.
	Search by Industry		Applications or process step		Keyword or Product Name
		and/or		and/or

Email this page to a friend

To send this page to someone by email, complete the form and click "send."

An email has been sent to your friend.

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

In-line Teflon® Gas Filter

For all chemical resistance applications

Teflon® membrane with stainless steel housing - for all chemical resistance applications

Superior particulate filtration for ultrapure gas applications - PTFE membrane

Large filtration area - 3X larger filtration, low pressure drop and high flow
Same length dimension as current filter generation, eliminating design changes of the gas panel or delivery system
Extended filter lifetime - 3X longer than earlier generation and reduced cost of ownership (COO)

Cost-effective 0.003 µm compressed air and inert gas filter for mid-flow range, noncritical applications

Filter element - PTFE membrane supported by polypropylene structures - provides a cost-effective solution
Large inside diameter of filter element is designed for high flow rate/low pressure drop, resulting in up to 1000 SLPM with compact housing
Various fitting and length configurations provide ease of installation without design changes of the gas panel and delivery system

Cost-effective compressed air and inert gas filter for high flow range, noncritical applications

Filter element - Teflon® PTFE membrane supported by polypropylene structures - provides a cost-effective solution for filtraiton of compressed air and inert gases
Can be used up-to 3000 SLPM for high-flow applications

Superior particulate filtration for ultrapure gas system filtration

Superior particulate filtration for ultrapure gas applications

All Teflon® filter element provides the industry’s best performance for ultrapure applications
Excellent compatibility with all classes of semiconductor process gases as well as general nitrogen and CDA applications
Specifically designed for high flow and low delta pressure applications
For use with inert and reactive gases, including ozone
Pre-conditioned for fast startup (Silver only)
Select ultrahigh purity (Silver) or high purity (Bronze) surface finish

Superior particulate filtration for ultrapure gas systems

Superior particulate filtration for ultrapure gas systems

Clean, dry air for industrial applications