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Planarcore® PVA Brushes

Molded-through-the-core PVA brushes for post-CMP equipment by Applied Materials®, Ebara® and Ontrak®
Planarcore® PVA brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post-CMP wafer cleaning applications. The unique molded-through-the-core technology provides absolute adhesion of the PVA (polyvinyl alcohol) to the brush core, unlike standard PVA products that are merely friction fitted to the core. The dimensional stability and core flow equalization of disposable Planarcore PVA brushes also eliminates the uncertainty associated with stand-alone and pre-mounted PVA products. PVA slippage, expansion and loss of concentricity are no longer a concern with the superior performance of Planarcore PVA brushes from Entegris.
Planarcore PVA Brushes
For Applied Materials® Reflexion® and Mirra Mesa® equipment
  • Optimized for the needs of next-generation copper and ILD applications
  • Designed with molded-through-the-core construction
  • Polypropylene mandrel and polyvinyl alcohol (PVA) brush construction
Planarcore PVA Brushes
For Ontrak® and Ebara® 200 mm and 300 mm equipment
  • Designed to meet the needs of next-generation copper and ILD applications
  • Designed with molded-through-the-core construction