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Semiconductor
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Flat Panel Display
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Compound Semiconductor
- Filtration
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Data Storage
- Hard Disk Drive Assembly
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Aerospace
- Premium Graphite
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Solar/Clean Energy
- Fuel Cells
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Life Science
Emerging Technologies
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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Pre-sputter Texture or Abrasive Clean

Liquid filters for pre-sputter texture or abrasive clean

Our expertise in material science and contamination control enables our customers to meet the demands of the market by reducing costs, enhancing yields, increasing productivity and improving process control.

Planargard® NMB Cartridge Filter

Sub 32 nm node CMP slurry filtration with leading edge of "Nanofiber Continuous Melt-blown" technology

Various retention ratings
Nanofiber CMB technology
Optimized graded depth structure
CDS and bulk filtration applications

ProcessGard® DSP Filters

Optimized pleated depth filter for polishing and texture slurry

Optimized pleated media
Depth design
Available in pore sizes down to 0.1 μm
All-polypropylene supports
Available in various cartridge and disposable formats