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Wafergard® Gas Filters

In-line filtration solutions for all process gases

Wafergard® in-line gas filters are available in nickel, stainless steel or PTFE/PFA membranes to match the specific needs of each class of process gas. Wafergard filters offer excellent downstream cleanliness, high-efficiency filtration with outstanding flow differential performance.

 

 
Wafergard C2 1.125" C-Seal Surface Mount Sandwich Gas Filters
All-metal ultrapure filter dramatically reduces footprint
  • Provides the industry’s best filter in a surface-mount design
  • Inlet feed through to device mounted above provides filtration/protection of returning gas to ensure cleanliness for downstream devices
  • Available with nickel or stainless membrane
Wafergard III NF-30 In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
  • Typically used for flows up to 30 SLPM
Wafergard III NF-75 In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
  • Typically used for flows up to 75 SLPM
Wafergard III NF-750 Gas Filters
Superior particulate filtration for high-purity gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
  • Typically used for flows up to 750 SLPM
Wafergard III NF Micro In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
Wafergard III NF Mini In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
  • Typically used for flows up to 60 SLPM
Wafergard III NF Mini XL In-Line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
  • Typically used for flows up to 120 SLPM
Wafergard MAX In-line Teflon® Gas Filters
Superior particulate filtration for ultrapure gas applications
  • All Teflon® filter element provides the industry’s best performance for ultrapure applications
  • Excellent compatibility with all classes of semiconductor process gases as well as general nitrogen and CDA applications
  • Specifically designed for high flow and low delta pressure applications
  • For use with inert and reactive gases, including ozone
  • Pre-conditioned for fast startup (Silver only)
  • Select ultrahigh purity (Silver) or high purity (Bronze) surface finish