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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Gas Processes

Providing purity in process gases

Removing defect-causing materials from process gases and liquids is a significant contributor to overall fab yield. Entegris gas filters and purifiers remove these damaging materials and particles before they contact the wafer or substrate, reducing photovoltaic cell scrap rates and improving cell efficiency. Featuring a wide array of membrane and media technologies, Entegris filters and purifiers address the complete portfolio of process gases in the cell making fab.

Gas Filters

Teflon® membrane with stainless steel housing - for all chemical resistance applications

PTFE membranes provide high-efficiency filtration
Low pressure drop reduces the risk of condensation in low vapor pressure gases
Excellent compatibility with all classes of semiconductor process gases
For use with inert and reactive gases, including ozone

Gas Purification

Gas purification solutions for the removal of contaminants down to the part-per-trillion level

Bulk, point-of-use (POU) and automatic regenerable systems available for wide variety of process gases
Removes damaging contaminants from gas process streams to prevent defects

Gas Diffusers

Fast vent diffusers with no introduction or disturbance of particles in process chambers

Combined flow characteristics of a diffuser with a high-performance filter to increase efficiency and yield
Ultrapure, diffused gas is delivered to the process chamber, minimizing on-wafer defects
Compatible with most system designs for easy installation or retrofit into load lock chambers, cooling chambers, transfer chambers and process chambers