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Impact® Filters

Point-of-use photochemical filter for BARC, Resist and TARC materials

 

Impact® filters are designed for point-of-use (POU) photochemical applications such as BARC, Resist and TARC materials. Utilizing Entegris’ UPE (ultra high molecular weight polyethylene) membranes, Impact filters remove hard particles and gels from photochemicals.
Impact® 2 Filter Family
Rapid change-out UPE membrane filters for point-of-use photochemical filtration, including photoresists and solvents
  • Developed for use with the Impact® 2 manifold and IntelliGen® dispense systems
  • Point-of-use photochemical and solvent filtration
  • Minimal chemical exposure, rapid connection design
  • UPE and surface modified UPE membrane technology
  • Low hold-up volume minimizes chemical waste
Impact® 2 Manifold
For Impact 2 liquid filters
  • Compact, stable design provides easy installation
  • Rapid filter changeout with minimal exposure to process fluids
Impact® Asymmetric Disposable Filters
Rapid changeout UPE membrane filters for point-of-use photochemical filtration, including photoresists and solvents. Available in 5 nm and 10 nm retention ratings
  • Available in 5 nm retention rating - tightest membrane technology to meet critical line-width processes
  • Design optimized for use with the Impact® manifold and IntelliGen® dispense systems; extremely clean for metal ions and extractables
  • Minimal chemical exposure, rapid connection design, allows quick filter installation and minimizes downtime while limiting the handling of hazardous chemicals during the installation and disposal processes, thereby promoting a more healthy workplace
  • Small footprint allows installation of more filters on tools for advanced systems
  • Low holdup volume minimizes chemical waste
  • New pleating technology: Impact V2 5 nm and 10 nm products incorporate more membrane within the same 0.03 μm and 0.05 μm Impact V2 filters, providing the footprint and benefits of ultra fine retention without a flow or pressure drop penalty
  • Proprietary cleaning technology ensures low metals and organic extractables, eliminating another variable to the customer’s process
Impact® Mini Filters - Ultra-low hold-up volume
Rapid change-out UPE membrane filter for point-of-use photochemical filtration, including photoresists and solvents
  • Ultra-low hold-up volume minimizes chemical waste, reduces opportunities for nucleation sites
  • Low surface area reduces chemical waste during filter startup
  • Lower surface area and elimination of a cage insures lower extractables and ultra cleanliness
  • Designed for use with IntelliGen® Mini dispense system
Impact® Plus Filter
Point-of-use filter for photochemicals, including photoresists and solvents
  • Ultra-high molecular weight polyethylene (UPE) membrane technology
  • Rapid filter change-out design
  • Low hold-up volume limits chemical waste
  • Designed for use with the Impact® ST manifold and IntelliGen® Mini dispense system
Impact® ST Manifold
For use with Impact Plus disposable filters
  • Rapid filter changeout with minimal dripping: no tools and no draining required
  • Compact design provides easy installation or retrofit into existing tools