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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Physical Vapor Deposition (PVD) Coatings

Specialty coatings of alumina, aluminum nitride, aluminum oxynitride and yttria

Entegris specializes in the deposition of metal and metal-alloy coatings by a variety of PVD processes including sputtering, ion plating and evaporation. The PVD process can be used to deposit coatings on a variety of vacuum compatible substrates including metals, ceramics and polymers at low temperature (<250°C). The coatings are dense, strongly adherent and micro-grained.

PVD Coating Benefits

Dense and micro-grained
Deposited on variety of substrates including metals, ceramics and polymer

Process Capabilities

Entegris has variety of chamber sizes capable of depositing coatings on parts up to 20” in diameter. Entegris utilizes a variety of PVD processes to deposit various metals, alloys and compounds.

Radio Frequency or DC Diode sputtering
DC or RF Magnetron sputtering
Pulsed Magnetron sputtering
Reactive sputtering
Sputter ion plating
Ion etching/Ion beam sputtering
Thermal evaporation

ALON™ Coating

Highly fluorine etch-resistant and transparent coatings

Excellent fluorine etch resistance
Low particle generation
Dense and transparent
Oxidation and errosion resistant
Ideal for semiconductor and high-temperature applications

AluMax™ Coating

Micro-grain aluminum oxide

Dense, strongly adherent and amorphous alumina coating deposited using reactive DC pulsed magnetron sputtering
Oxidation resistant to 1100°C
Protects metal and alloy components against high-temperature oxidation
Suitable for high-temperature applications

Yttria Coating

Fluorine etch resistant yttirum oxide coating

Excellent fluorine etch resistance
Low particle generation
Dense and transparent
Oxidation and errosion resistant
Ideal for semiconductor and high-temperature applications

Ziramic™ Coating

Ceramic-metal coating based on a complex compound of zirconium metal

Excellent release properties
Superior wear resistance
Suitable for cutting tools such as end mills, taps, chasers, reamers, punches and plastic molding components