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Fluorogard® Filters

PTFE membrane filter for a broad range of applications
Fluorogard® filters are designed to efficiently remove particles from a broad range of acids, bases, solvents and other process chemicals in semiconductor, flat panel display and data storage manufacturing applications. Featuring PTFE membranes, Fluorogard filters are available in hydrophobic and hydrophilic membranes. These filters are recommended for medium to high flow applications.
Fluorogard® ATE Filters
All-PTFE filters with broad chemical and temperature range compatibility for high flow and low cost of ownership
  • Increased yield, higher throughput through improved chemical cleanliness: retention rating down to 0.03 μm; low particle shedding; low extractable level
  • Faster bath cleanup, lower COO through higher surface area using M-pleat structure
  • Higher flow, longer lifetime, lower pressure drop (less stress on other components like pumps, etc.)
  • Available in a prewet version for quicker/easier installation with no solvent needed for prewetting and no flushing required
Fluorogard® ATE UCM 20 nm Cartridge Filter - Ultra Clean
High-volume organic solvent filter
  • High-retention rating at 20 nm improves single-pass retention efficiency improves chemical cleanliness
  • Low particle shedding improves chemical cleanliness
  • Ultra-low extractables level improves chemical cleanliness
  • Higher surface area using the ATE M pleat structure improves filter lifetime and lowers pressure drop (less stress on other components such as pumps)
  • All-fluoropolymer construction provides the best chemical compatibility in a multitude of applications
Fluorogard® AT Filters
All-Teflon® membrane filter for wet etch and clean applications
  • Ideal for higher temperature applications
  • All-fluoropolymer materials of construction provide a broad range of chemical compatibility
  • Highly retentive hydrophobic PTFE membrane and PFA supports provide superior resistance in strong chemical processing, pulsing, and high pressure applications
Fluorogard® FP Filter Family
PTFE membrane filter for flat panel display manufacturing applications
  • Hydrophillc and Hydrophobic membranes available
  • Durable PTFE Membrane
  • Polypropylene (PP) construction
  • No prewetting required
Fluorogard® RS Filter Family
PTFE membrane filter for photoresist residue removal applications
  • High-capacity multiple layer, membrane optimized structure and layering technology
  • Available in cartridges and disposable filters. Disposables available with Flaretek®, Pillar® and Flowell® compatible fittings
  • Provides excellent gel and small particle retention in a single cartridge design
  • High-flow cartridge design with optimized membrane pleating