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Intercept® Cartridge and Disposable Filters

Hydrophilic dual-capture membrane for superior particle removal in batch baths, single wafer tools, and chemical delivery systems in a high-flow filter

 

Intercept® filters use a patented UPE membrane that provides sieving as well as physiosorption particle removal to provide ultra particle retention and process capabilities. Intercept filters hydrophilic membrane also eliminates nucleation sites, to reduce the potential for microbubble formation. The result – rapid system startup, elimination of bubble generation, elimination of bubble-induced performance issues, high-flow rates and minimum pressure drop. Intercept HP filters provide dramatic improvements in Overall Equipment Efficiency (OEE) in recirculation baths, and provides exception physiosorption performance in baths where pH <3 and no surfactant is present.

 

Available in a variety of retention ratings from 0.2 µm down to 20 nm to cover a broad scope of process requirements
Intercept® Cartridge and Disposable Filters
Hydrophilic dual-capture membrane for superior particle removal in batch baths, single wafer tools, and chemical delivery systems in a high-flow filter
  • Dual-particle capture mechanism - patented hydrophilic membrane structure provides enhanced particle removal capabilities
  • High flow hydrophilic membrane with large filtration area provides rapid particle removal and microbubble control for faster bath startup/system qualification and increased yields
  • Extreme cleanliness in terms of particle shedding and metal extractables
  • High sieving retention at filter's rating
  • Available in a variety of retention ratings from 0.2 µm down to 20 nm to cover a broad scope of process requirements