Advanced membrane filtration for a wide variety of aqueous-based chemical applications
QuickChange® filters are optimized for use in chemical systems where the risk of particle contamination cannot be tolerated. Entegris' nondewetting filter membrane delivers Enabling Yield® performance by providing consistent retention properties. In addition, QuickChange technology is proven to retain its nondewetting properties when chemical baths are drained or purged. Consequently, bath-operation-stability is maintained because risk of filter dewetting in out-gassing chemistries is eliminated. The proven reliability of QuickChange filters also features reductions in filter change-out time and cost of ownership. QuickChange filters are recommended for use with aqueous-based chemicals at ambient temperatures (including H2SO4, H2PO4, HNO3, HF, HCl, BOE, NH4F, H2O2, TMAH, NH4OH and ozonated water) and elevated temperature applications (including SC1, SC2, SPM nitride etch, metal etch and various other organic-resist strippers).
Choosing the right QuickChange Filter? Easy.
ATE - Most advanced, best value filtration with the highest flow, especially in viscous chemistries
ATM - Good value filtration for higher flow recirculating applications
ATX - Low-cost filtration wtih moderate flow needs in legacy processes
AT - Lowest cost, lower-flow filtration of legacy and multi-round housing applications
Plus - Small format point-of-use (POU) filtration
UCM - Ultra low extractable disposable filters for critical cleaning applications*
For more information, please contact the Entegris Customer Support team.
*All QuickChange styles are available with the UCM option