Home > Industries > Semiconductor > Wet Etch and Clean > Product Line

Industries

Semiconductor
- CMP
- Facilities
- Implant Beamline
- Photolithography
- Plating
- Premium Graphite
- Specialty Coatings
- Vacuum Processes
- Wafer Handling
- Wet Etch and Clean
Flat Panel Display
- Array Process
- Color Filter
- Facilities
- Photolithography
- Substrate Handling
- Thin Film Transistors
- Wet Etch and Clean
Compound Semiconductor
- Filtration
- Purification
Data Storage
- Hard Disk Drive Assembly
- Hard Disk Media
- Disk Drive & Component Handling
- Hard Disk Substrates
- Head Wafer and Backend Assembly
Aerospace
- Premium Graphite
- Specialty Coatings
Solar/Clean Energy
- Fuel Cells
- Lithium Ion Battery
Life Science
Emerging Technologies
- Electrostatic Clamp
- PVA Brushes

Select one or more of the following fields in order to begin your search.
	Search by Industry		Applications or process step		Keyword or Product Name
		and/or		and/or

Email This Page

Print This Page

Email this page to a friend

To send this page to someone by email, complete the form and click "send."

An email has been sent to your friend.

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Fluid Handling Components

Entegris offers a complete line of PFA high-purity fluid handling components, including: valves, fittings, tubing and pipe in 1/4" to 2" sizes. Regardless of fluid handling application, Entegris can provide a fully characterized product that meets your temperature, pressure, flow, size, configuration and installation specifications.


Valves Designed for use with high-purity corrosive chemicals
	All wetted components are PFA and PTFE Small footprint saving valuable space on OEM equipment 180°C media temperatures up to 40 PSIG, CH8 series Valves offer a variety of connections options: PrimeLock™, PrimeLock™ "SpaceSaver", Flaretek®, Flaretek® "SpaceSaver", Purebond® and Pillar® S300

Dymension® Manifolds Complex fluid control in minimized footprint
	Complex flow path and control in a single component lowers cost of ownership Manifold specifications Wide variety of valve orifices available in 1/4" - 1" Offers a variety of connection options: PrimeLock™, PrimeLock™ "SpaceSaver", Flaretek®, Flaretek® "SpaceSaver", PureBond® and Pillar® S300 Actuators; pneumatic normally open or closed with optional position sensing, multi-turn, quick rinse mixing, restricted actuation, 3-way, needle and suck-back Design capabilities include various computational fluid dynamic simulations Flow performance to determine pressure drop and flow velocity Mixing analysis to determine mixing effectivess Flush-out performance to analyze the rinsibility of chemical flow paths

Fittings (Featuring PrimeLock™ Fittings) Designed for high-purity, corrosive chemical handling
	Consistent and repeatable fitting makeup No cross-threading, quick makeup, increased sealing force Nonwetted insert reduces entrapment, leak points and flow interruptions Audible and visual indication of proper fitting makeup

Tubing and Pipe Designed for use in high-purity process equipment as well as bulk chemical delivery applications
	Standard wall tubing is available in 1/4", 3/8", 1/2", 3/4", 1", 1 1/4" and 1 1/2" diameters Tubing offered in a wide variety of PFA materials Available in reels from 150 meters to 1,500 meters