Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com or entegrisfuelcells.com)
Material purity and compatibility with process equipment and substrates are two critical factors in the continued advancement of HBLED (high brightness light emitting diodes) technologies. Entegris purification and filtration products enable the manufacturing HBLEDs with the highest photoluminescence peaks and luminous efficiencies while our 30+ years of wafer shipping experience allows us to design the ultimate protection for these critical substrates.
Gas filtration and flow control/venting (diffuser) of high-purity materials in HBLED applications
Regenerable point-of-use and system-scale purification technologies for high-purity gas applications
Advanced protection for fragile substrates