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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Flat Panel Display Manufacturing

The Flat Panel Display (FPD) fabrication environment is among the worlds most competitive and technologically complex. Device designers and manufacturers continually strive to satisfy the worldwide consumer’s appetite for larger displays, greater pixel resolution and feature-rich performance – all at a lower cost than the previous generation of technology. The need to control contamination in air, gas and liquid process streams is now a paramount focus of process engineers and designers. Entegris provides the solutions to succeed under these extreme conditions.

 

Liquid Filtration   Gas Filtration   Gas Purification   Fluid Handling Components   Fittings Mobile Selection Tool

Array Process

Filtration, purification and fluid handling solutions for cell processes in flat panel display applications

Color Filter

Liquid filters and fluid handling components for color filter processes in flat panel display applications

Facilities (BCDS and CDS)

Liquid filters and fluid handling components for FPD chemical delivery systems

FPD Photolithography

Liquid, air, gas and ultrapure water filtration and purification solutions for photolithography applications

Substrate Handling

Wafer pods and cassettes for flat panel display handling applications

Thin Film Transistor (TFT)

Liquid and gas filters, gas diffusers and fluid handling components for TFT processes in flat panel display applications

FPD Wet Etch and Clean

Liquid and gas filters/purifiers, heat exchangers, valves, fittings, tubing/pipe, wafer transport and other solutions