Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)
Material purity and the safe transport of wafers is the central value Entegris provides in the semiconductor fab. We purify, protect and transport the world’s semiconductor fab materials, including the array of liquids, air and gases contacting wafers of all sizes. Our customers turn to us to solve contamination and microenvironment challenges in all application areas.
Fluid Handling Product Catalog Wafer/ Reticle Handling Product Catalog
IC Handling Product Catalog Fittings Mobile Selection Tool
Slurry filters, PVA brushes, pad conditioners, retaining rings, sensing and control devices and other solutions
Filtration, purification, storage and delivery of process chemicals gases and water
Entegris has a material solution for the components used along the beamline.
Liquid, air, gas and ultrapure water filtration and purification solutions, specialty materials, wafer and fluid handling technologies for photolithography applications
Electrochemical plating/deposition (ECD/ECP) applications for semiconductor processes
Graphite grades categorized by the market they serve and grain size
Surface metallurgy and engineered coatings solutions
Gas filters and diffusers to perform critical process steps including dry etch, deposition (CVD/PVD/Oxide), Ion Implant, EPI and RPT
FOUP, FOSB and and other wafer protection and transport solutions
Liquid and gas filters/purifiers, flow controllers, heat exchangers, fluid handling components, wafer transport and other solutions