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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Semiconductor

Material purity and the safe transport of wafers is the central value Entegris provides in the semiconductor fab. We purify, protect and transport the world’s semiconductor fab materials, including the array of liquids, air and gases contacting wafers of all sizes. Our customers turn to us to solve contamination and microenvironment challenges in all application areas. 

 

 

To find product information on Entegris filtration solutions, go to the Filtration Product Catalog

 

To find product information on Entegris fluid handling solutions, go to the Fluid Handling Product Catalog

 

To find product information on Entegris purification solutions, go to the Purification Product Catalog

 

 To find product information on Entegris wafer handling solutions, go to the Wafer/ Reticle Handling Product Catalog

 

To find product information on Entegris Test, Assembly and Packaging products, go to the IC Handling Product Catalog

CMP

Slurry filters, PVA brushes, flow controllers and other solutions

Facilities

Filtration, purification, storage and deleivery of process chemicals gases and water

Ion Implant

Gas filters and diffusers  for semiconductor applications

Photolithography

Liquid, air, gas and ultrapure water filtration and purification solutions for photolithography applications

Plating

Electrochemical plating/deposition (ECD/ECP) applications for semiconductor processes

Specialty Coatings

Surface metallurgy and engineered coatings solutions

Wafer Handling

FOUP, FOSB and and other wafer protection and transport solutions

Wet Etch and Clean

Liquid and gas filters/ purifiers, flow controllers, heat exchangers, manifolds, wafer transport and other solutions