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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Semiconductor

Material purity and the safe transport of wafers is the central value Entegris provides in the semiconductor fab. We purify, protect and transport the world’s semiconductor fab materials, including the array of liquids, air and gases contacting wafers of all sizes. Our customers turn to us to solve contamination and microenvironment challenges in all application areas.

 

Fluid Handling Product Catalog   Wafer/ Reticle Handling Product Catalog

IC Handling Product Catalog   Fittings Mobile Selection Tool

  

 

Chemical Mechanical Planarization (CMP)

Slurry filters, PVA brushes, pad conditioners, retaining rings, sensing and control devices and other solutions

Facilities

Filtration, purification, storage and delivery of process chemicals gases and water

Implant Beamline

Entegris has a material solution for the components used along the beamline.

Photolithography

Liquid, air, gas and ultrapure water filtration and purification solutions, specialty materials, wafer and fluid handling technologies for photolithography applications

Plating

Electrochemical plating/deposition (ECD/ECP) applications for semiconductor processes

Premium Graphite Composite

Graphite grades categorized by the market they serve and grain size

Specialty Coatings

Surface metallurgy and engineered coatings solutions

Vacuum Processes

Gas filters and diffusers to perform critical process steps including dry etch, deposition (CVD/PVD/Oxide), Ion Implant, EPI and RPT

Wafer Handling & Transport

FOUP, FOSB and and other wafer protection and transport solutions

Wet Etch and Clean

Liquid and gas filters/purifiers, flow controllers, heat exchangers, fluid handling components, wafer transport and other solutions