Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)
Material purity and the safe transport of wafers is the central value Entegris provides in the semiconductor fab. We purify, protect and transport the world’s semiconductor fab materials, including the array of liquids, air and gases contacting wafers of all sizes. Our customers turn to us to solve contamination and microenvironment challenges in all application areas.
To find product information on Entegris filtration solutions, go to the Filtration Product Catalog
To find product information on Entegris fluid handling solutions, go to the Fluid Handling Product Catalog
To find product information on Entegris purification solutions, go to the Purification Product Catalog
To find product information on Entegris wafer handling solutions, go to the Wafer/ Reticle Handling Product Catalog
To find product information on Entegris Test, Assembly and Packaging products, go to the IC Handling Product Catalog
Slurry filters, PVA brushes, pad conditioners, retaining rings, flow controllers and other solutions
Filtration, purification, storage and deleivery of process chemicals gases and water
Gas filters and diffusers to perform critical process steps including dry etch, deposition (CVD/PVD/Oxide), Ion Implant, EPI and RPT
Liquid, air, gas and ultrapure water filtration and purification solutions for photolithography applications
Electrochemical plating/deposition (ECD/ECP) applications for semiconductor processes
Graphite grades categorized by the market they serve and grain size
Surface metallurgy and engineered coatings solutions
FOUP, FOSB and and other wafer protection and transport solutions
Liquid and gas filters/ purifiers, flow controllers, heat exchangers, manifolds, wafer transport and other solutions