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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Post-CMP Cleaning Brushes

Superior performance and wafer-to-wafer cleaning consistency

 

Designed for use with AMAT®, Ontrak® and Ebara® CMP equipment, Planarcore® PVA brushes feature molded-through-the-core construction for superior performance and wafer-to-wafer cleaning consistency. While other brushes are merely friction fitted, the molded-through-the-core construction prevents PVA slippage and improves dimensional stability.

 

Planarcore® PVA Brushes For AMAT®

Molded-through-the-core PP (polypropylene) PVA brushes

Planarcore® PVA Brush for Ebara®

Molded-through-the-core PP (polypropylene) and PVC (polyvinyl chloride) PVA brushes

Planarcore® PVA Brush for Ontrak®

Molded-through-the-core PP (polypropylene) and PVC (polyvinyl chloride) PVA brushes