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CMP Consumables
- Post-CMP Cleaning Brushes
- CMP Slurry Filtration
- Retaining Rings
- Pad Conditioners
Fluid Handling
Wafer/Reticle Handling
IC Device Handling
Disk Drive Handling
Dissolved Gas Solutions
- Degassification
- Regassification
Filtration
- AMC Filtration
- Gas Diffuser
- Gas Filtration
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- CMP Slurry Filtration
Purification
- Gas Purification
- Liquid Purification
Specialty Materials
- Premium Graphite & Silicon Carbide
- Polymer Composites
- Specialty Coatings
Systems
- Liquid Systems
Emerging Technologies
- E-clamps
- Fuel Cells
- pHasor® X Heat Exchanger
- Retaining Rings
- Pad Conditioners
- Degassification
- Regassification
- Liquid Systems

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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Retaining Rings

Delivers stability with improved consistency and cleanliness

Planaredge® retaining rings are designed to deliver superior performance and lowest the cost of ownership for your most advanced copper, oxide, tungsten or STI CMP process. The unique, injection-molded composite design delivers stability with improved consistency and cleanliness, fully customizable to your specifications.

Planaredge® Retaining Rings

Fully-molded, all-polymer design for the most advanced copper, oxide, tungsten or STI CMP processes