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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Post-CMP Cleaning Brushes

Molded-through-the-core PVA brushes for post-CMP equipment by Applied Materials®, Ebara® and Ontrak®

Designed for use with AMAT®, Ontrak® and Ebara® CMP equipment, Planarcore® PVA brushes feature molded-through-the-core construction for superior performance and wafer-to-wafer cleaning consistency. While other brushes are merely friction fitted, the molded-through-the-core construction prevents PVA slippage and improves dimensional stability.

Planarcore® PVA Brushes

Planarcore® PVA brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post-CMP wafer cleaning applications.