Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)
Entegris is a pioneer in the fabrication and commercialization of ceramic E-Chucks (Electrostatic Clamps) and has been supplying to this industry for more than 10 years. E-chucks have become essential tools in the silicon wafer processing industry by significantly increasing usable wafer area and wafer throughput, both of which contribute to increased yields.
All Entegris E-Chucks are precision manufactured in-house.