Regassification - Ultrapure DI Water
Controlled regasification of ultrapure DI water
Advanced cleaning steps demand a broad range of water flow and fast flow rate changes. It is important to maintain a stable dissolved gas concentration to ensure a non-disruptive and stable process. Entegris has designed a solution that includes either a full system or a singular component depending on the needs of the process. The automatic gasification system incorporates the pHasor® II membrane contactor and an optimized PID control loop to maintain the dissolved gas concentration to a customer-specified set point as process flow changes. The system is equipped with gas and liquid flow controllers, a dissolved gas sensor and other automated features to reduce system maintenance and downtime. Its unique patent-pending direct gas injection method minimizes gas and fluid consumption as well as system complexity.