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Entegris ultrapure gas filtration products offer 0.003 microns particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint. Entegris' ultrapure gas filtration products are used by all major semiconductor OEMs and device makers in etch, CVD, PVD and ion implantation tools as well as other high-performance applications such as photovoltaics, flat panel display, data storage and HBLED (high brigtness light emitting diodes). Entegris incorporates its gas filters into our gas purifiers to provide process and purge gases free from both molecular and particle contamination.
Nickel or stainless steel membrane with stainless steel housing - for high-pressure, high-temperature applications
Teflon® membrane with stainless steel housing - for all chemical resistance applications
Nickel or stainless steel membrane with stainless steel housing - for 1.125", 1.5" IGS application (C or W-seal)
Gas filters for a variety of unique applications