Contamination control continues to evolve and enable the technological advancements and yield improvements in semiconductor, flat panel, data storage, photovoltaic cell, life sciences and lithium ion battery manufacturing. CMP slurries, acids, bases, photochemistry and DI water all require advanced filtration to remove defect-causing particles and agglomerate before reaching the wafer or substrate surface. Entegris provides a full line of filters to solve the contamination control challenges our customers face.
How do you prefer to select Entegris filters? Product Name, Membrane/Media or Chemical Application?
Product: Chemlock®, Etchgard™, Fluorogard®, Fluoroline®, Guardian®, Impact®, Intercept®, Microgard®, Optimizer®, Panelgard®, Planarcap®, Planargard®, Processgard®, Pumpgard™, QuickChange®, Savana® , Solaris®, Thermogard™, Torrento®
Membrane: UPE, PTFE, PES, PP, Nylon, Composite (DUO)
Chemical Application: Please see the section below.