Inorganic regenerable media to purify gas at ambient temperatures to part-per-trillion levels
Entegris' innovative gas microcontamination control products and technologies help ensure our customers are equipped with the latest technologies and are prepared for the challenges of tomorrow's advanced devices, photovoltaics, life sciences and lithium ion batteries. One recent example is the CHS controlled humidity source used to introduce humidity to process and carrier gases such as CDA (clean dry air) and N2, providing a continuous source of ultrapure humidified gas to the process tool.
Interested in learning more about the gas contamination challenges in leading-edge lithography? Watch a recent Solid State Report from Solid State Technology.
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