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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Liquid Purification

Removal of metal ion contaminants

Entegris' liquid purification technologies deliver the ultimate protection from metal ion contamination by providing high capacity, single pass removal of metal ions from ultrapure water and some organic solvents. Ideal for critical cleaning applications including DI water rinse on recirculation and single pass process tools, wafer dry and post CMP cleans.

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Filter Results: Your selection returned the following items within this category.

Chemlock® Housings

Designed for tool space saving and easy filter cartridge changeout.

Protego® Filters/Purifiers

Designed to remove metal ion contamination from ultrapure water and some organic solvents.