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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Field Support Services

Our field service program allows us to provide you with the support you need within your own facility. By working at your site, we are able to give you custom care that works within your specific process procedures. We offer:

Installation Support

  • Gas systems
  • Liquid systems
  • Dispense systems

Warranty Support

  • Gas systems
  • Liquid systems
  • Dispense systems

Service Programs

  • Gas systems
  • Liquid systems
  • Dispense systems

Analytic Services

  • AMC sampling
  • Qualification
  • Contamination and product analysis

Application Support

 

Other Services:   Cleaning   Analytical   Refurbishment/Reclaim