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Products

CMP Consumables
- Post-CMP Cleaning Brushes
- CMP Slurry Filtration
Disk Drive Handling
Emerging Technologies
- E-clamps
- Fuel Cells
- Liquid Systems
- Dissolved Gas Concentration
- Thermal Management
Filtration
- AMC Filtration
- Gas Diffuser
- Gas Filtration
- Liquid Filtration
- CMP Slurry Filtration
Fluid Handling
- High Temperature Chemical Solutions
- Liquid Systems
IC Device Handling
Purification
- Gas Purification
- Liquid Purification
- AMC Filtration
Services
- Field Support Services
- Cleaning Services
- Analytical Services
- Refurbishment/Reclaim Services
Specialty Materials
- Premium Graphite & Silicon Carbide
- Specialty Coatings
Purification Systems
- Liquid Systems
- Gas Purification Systems
Wafer/Reticle Handling

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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Field Support Services

Our field service program allows us to provide you with the support you need within your own facility. By working at your site, we are able to give you custom care that works within your specific process procedures. We offer:

Installation Support

Gas systems
Liquid systems
Dispense systems

Warranty Support

Gas systems
Liquid systems
Dispense systems

Service Programs

Gas systems
Liquid systems
Dispense systems

Analytic Services

AMC sampling
Qualification
Contamination and product analysis

Application Support

Other Services: Cleaning Analytical Refurbishment/Reclaim