Products

Purification, chemical handling and process control for the most stringent fluidic applications

Whether you are a fab engineer or OEM designer looking for immediate professional solutions for liquid and gas contamination problems, Entegris develops and manufactures high-purity liquid systems and subsystems for UPW and chemical delivery. Entegris liquid systems provide:

Contamination monitoring and treatment by reducing:

• TOC
• Particles
• Metals
• Bacteria
• Dissolved gas

Process control and stability:

• Precise liquid temperature control within 0.1ºC
• Precise liquid pressure and flow control
• Aggressive and non-aggressive chemicals handling
• Efficiency in electricity, gas and water consumption
• Safety for equipment and human

Depending on your needs, you can either pick one of our catalog products or have a product developed for you, or get assistance in any stage of product development.

Benefits of working with Entegris:

• A complete solution for advanced technical problems from diagnostics to development to manufacturing to installation
• Fast time to market
• Trusted provider of liquid contamination control solutions since 1966
• Certification ready
• Worldwide on-site service

For more information about liquid systems please contact your Regional Representative.