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Emerging Technologies

Entegris continues to seek the forefront of technology development and new product introduction. Our customers in semiconductor, data storage, flat panel display and other high-tech industries look to Entegris' materials science expertise, engineering expertise and global field service teams to provide products, solutions and services that solve their problems and improve yield.

 

The new products featured here are the latest technologies to emerge from Entegris.

E-Chucks

Electrostatic Clamps that exhibit high clamping force and low backside particle count

Fuel Cells

Separator plates and shipping solutions for fuel cell applications

pHasor® X Heat Exchanger

Maintain absolute process chemistry temperature and purity

Retaining Rings

Injection molded retaining rings constructed of PEEK

Pad Conditioner
CVD diamond bonded pad conditoners to prevent "pad glazing"
Degassification - Ultrapure DI Water

Components and systems for controlled degassification of ultrapure DI water

Regassification - Ultrapure DI Water
Components and systems for controlled regassification of ultrapure DI water
Liquid Systems

Specialized chemical mix, purification and management soltuions