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Controlling contamination in liquid, air and gas process streams enables more productive and technologically superior semiconductor, flat panel displays, data storage, photovoltaic, life sciences, lithium ion battery and other microelectronic manufacturing processes. Entegris provides filtration solutions based on a variety of media and membrane technologies using performance criteria as well as analytical services to detect contamination in technology environments and analyze/validate materials.
Solutions for chemical filtration of airborne molecular contamination (AMC)
Sintered nickel technology with 0.003 µm filtration technology in integrated filters/diffusers
Nickel, stainless steel and Teflon® filtration technologies for high-purity gas applications
Membrane and depth media filtration technologies for chemicals, water, solvents and photochemicals
Depth media filters for ceria, alumina and silica slurry