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Entegris fluid handling systems comprise the industry’s broadest range of carefully developed and fully characterized fluid handling products. Our products are rigorously tested to ensure reliability and constructed of robust materials that are able to withstand corrosive chemicals. We offer a wide variety of solutions to meet your needs; whether it is high-temperature, high flow, leak-free performance, reduced footprint, precise control and measurement of your process fluids, and much more. All of our fluid handling products will improve the output of your fab by keeping your processes pure and efficient.
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UN and DOT approved for safe handling of Group II and III chemicals
Reliable PFA components for life sciences applications
Leak-free flare connections for standard, high-temperature and high-pressure applications
Larger orifice valves, fittings and tubing to reduce the number of systems in your fab
Valves, flow meters, sensing and filter solutions to handle chemicals up to 180°C
Specialized chemical mix, purification and management solutions
Ultimate defect reduction in point-of-use photochemical dispense
Integrated flow controllers, flowmeters, pressure tranducers and other solutions for precision control and measurement of process fluids
100% virgin PFA and FEP tubing for highly corrosive chemicals
Ultrapure valves and manifolds for various temperatures, pressures, flow rates, sizes and configurations