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Wafer/Reticle Handling

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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Wafer/Reticle Handling

Wafer Cassette

Entegris is the industry leader and supplier of choice for predictable, reliable and innovative wafer and reticle handling solutions.

Click the video icon to view a brief message from Bill Shaner, Vice President and General Manager, Microenvironments Division.

Products
450 mm Wafer Handling	300 mm Wafer Handling	200 mm Wafer Handling	150 mm Wafer Handling
125 mm and Smaller Wafer Handling	Solar/LCD, Other Carriers and Labware	Mask and Reticle Handling	Reticle SMIF Pods