Cleaning and Polishing
PVA Brushes
Entegris' polyvinyl acetal (PVA) products revolutionize CMP post-cleaning and polishing applications. Our Planarcore® PVA disposable brushes reduce tool downtime and decrease on-wafer defectivity. Unlike standard PVA products that are merely friction fitted on the core, Planarcore® brushes utilize unique molded through the core technology, providing absolute adhesion of the PVA to the core. Planarcore® brush's dimensional stability and core flow equalization eliminate the guesswork associated with stand alone and pre-mounted PVA products, and delivers wafer to wafer uniformity unseen in post-CMP applications. PVA slippage, expansion, and loss of concentricity are eliminated with Planarcore® brushes.