Electrostatic Clamps
Electrostatic Clamps or "E-chucks" as they are more commonly known, have become essential tools in the silicon wafer processing industry. Electrostatic clamps reduce micro particle contamination and increase usable wafer area for increased chip yield. Gas-cooled electrostatic clamps also permit cooling of the wafer during processing. Developed from Surmet Coating technologies, Entegris Specialty Coatings is a pioneer in the fabrication and commercialization of ceramic electrostatic clamps with over a decade of innovation and product delivery. These technologies have played an important role in creating products and solutions that exhibit high clamping force and low backside particle count. Each clamp is precision-manufactured with excellent flatness and low surface roughness.