Cleaning Equipment
Entegris offers a broad line of cleaning equipment capable of cleaning all of Entegris' wafer carriers, wafer shippers and reticle carriers. Our cleaning technology combines water-based spray cleaning with air drying to give effective, reliable cleaning of wafer and reticle carriers in a small fab footprint.
Process One™ HTC 8030 is a general purpose cleaner for wafer carriers 200 mm and below, as well as for reticle carriers and SMIF pods.
Process One™ FX-30 is specifically designed for 300 mm wafer carriers, including both FOUPs and FOSBs.
Process One™ NU is an advanced spray wash and air dry tool for all wafer handling products.
View Cleaning Equipment product literature in the Resource Center.