Gas Purification
Entegris is the industry leader in gas purification solutions for photolithography, deposition, etch, compound semiconductor, and fuel cell applications. Entegris gas purification technology uses an inorganic regenerable media to purify gas at ambient temperatures to part-per-trillion levels. Regenerable purifiers are a cost-effective, environmentally friendly alternative to non-regenerable getter, organometallic resin, and palladium based technologies.
Common gases purified include nitrogen, clean dry air (CDA), ammonia, hydrogen, arsine, helium, and hydrogen chloride. Entegris offers purification in a variety of configurations. Due to their high capacity, GateKeeper® purifers are ideal for applications that require infrequent regeneration. Aeronex® Gas Purification Systems offer in-situ regeneration for continuous pure gas delivery.
Available from point-of-use to bulk applications, GateKeeper® purifiers and Aeronex® gas purification systems remove contaminants such as H2O, O2, CO, CO2, hydrocarbons, volatile acids, volatile bases, refractory compounds.
Benefits of purification include improved process yield and greater process control through the elimination of molecular contaminants.
GateKeeper® Gas Purifiers
Aeronex® Gas Purification Systems