Liquid Purification
Entegris' purification solutions deliver ultimate protection against metal ion contamination from ultrapure water and some organic solvents. They enable critical cleaning applications such as DI water rinse on re-circulation and single pass process tools, wafer dry and post CMP clean. Our purification solutions address issue with ion's tendency to bind with purification systems and other materials by effectively partitioning ions between the bound state and the dissolved state to prevent ion load-up. Effective management on ion binding lengthens purifier life. As effectiveness of liquid purification is related to flow in the bath and the ion retention of the purifier per pass, Entegris develop purifiers that achieve maximum retention in a single pass. Entegris' Protego® purifiers are your ultimate choice for safeguarding wafers from metallic ion contamination. The purifiers utilize long-life, high-capacity, single-pass, metallic ion removal technology to maximize total filtration volume and system uptime. They are available as purifiers or as purifier-filters, and can be used with a disposable shell to simplify installation and change-out.