Reticle Handling
A key area for cost reduction and yield improvement in the fab today is in the photolithography bay. The high cost of reticles makes it imperative to provide protection against elements that can reduce their useful life or affect the quality of the process.
Entegris offers several advanced products that provide superior protection for reticles during transport or storage, whether for 150 mm or 200 mm reticles. Recent advancements in purge, filtration and materials now make it possible to reduce reticle damage due to airborne contaminants, increase reticle life and reduce total reticle cost of ownership.
Click here to go to the product selection tool site showing descriptions and specifications for wafer and reticle handling products. Contact Entegris Customer Service for order placement.