Sensing and Control
Our core competency of sensing and control enables us to continually introduce new products that increase flow through smaller package sizes, maintain chemical integrity, and allow for accurate, repeatable and reliable measurements.
Entegris' sensing and control products allow users to accurately measure and control liquids while monitoring process parameters. Repeatable and accurate flow rates translate into increased yields, optimized chemical consumption, and fewer wafer defects in wet etch, CMP delivery, and on-demand chemical blending applications. From pressure transducers to closed-loop flow control systems, our sensing and control products enable customers to optimize their chemical consumption, ensure the integrity of their applications and significantly increase their yields.