Ultrapure Gas Filtration
Entegris ultrapure gas filtration products offer 0.003 microns particle filtration for ultrapure gas applications. These filters enable higher process gas throughput while reducing the overall gas box footprint. Entegris' ultrapure gas filtration products are used by all major OEM's and device makers in etch, CVD, PVD and ion implantation tools. Entegris incorporates its gas filters into our gas purifiers to provide process and purge gases free from both molecular and particle contamination.