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Fluid Handling

Bulk Chemical

In response to the industry's drive toward smaller line widths and increased purity requirements, Entegris continues to develop new solutions that reduce our customers' operating costs and improve the value of their chemical product.

Fluid Handling

With the broadest range of carefully developed and fully characterized fluid handling products, (open new window with this link) Entegris has been the market’s trusted source for reliable solutions to increase fab productivity for nearly 40 years.

Our comprehensive product offering of valves, fittings, tubing, pipe and related equipment means customers can turn to a single source for the majority of their fluid handing needs. Even better, they can rest assured all their fluid system components work together efficiently to help ensure integrity of their fluids and increase their process yields.

Leading technology providers in the microelectronics and semiconductor manufacturing industries count on Entegris to protect and transport their critical materials for both ultrapure and corrosive chemical applications. Our high-purity, corrosion-resistant products are continuously upgraded to provide new and innovative solutions that reduce process interruptions and reduce total cost of ownership.

Photochemical Dispense

Entegris continues its consistent pace of photochemical dispense product innovations that deliver ever increasing value for new and retrofit applications.

Sensing and Control

Our core competency of sensing and control enables us to continually introduce new products that increase flow through smaller package sizes, maintain chemical integrity, and allow for accurate, repeatable and reliable measurements.

Subsystems

Combining our extensive fluid handling product portfolio with more than 30-years of applications and process engineering experience, we are able to provide unique value added subsystems designed to address the most critical fluid process control challenges.

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Products

Entegris has the broadest range of fluid handling products to maximize fab productivity, improve fab yields and reduce cost of ownership throughout chemical manufacture, delivery and point-of-use. To review our complete offering, visit our fluid handling product selection tool.

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Resources

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