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Vaporsorb™ II VP

Superior protection against amine-based contaminants in Tokyo Electron Lithography Tracks
Data Sheet (398024)
 
Vaporsorb™ II VP
  • Protects against the full range of TMB gas phase contaminants
  • Guaranteed performance (when properly installed to OEM specifications)
  • Guaranteed configuration fit of filter sizes for all lithography coat-and-develop tracks
  • Long service life eliminates tool interruptions and lowers cost of ownership
 
Vaporsorb™ II VP

Amines
Ethylamine
Diethylamine
Ammonia
NMP

 

Examples of common contaminants captured.