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Vaporsorb™ CSP-32 Chemical Air Filters

Advanced optics and resist protection
Data Sheet (214567)
 
Vaporsorb™ CSP-32 Chemical Air Filters
  • Highly activated carbon plus advanced polymetric media removes acids, bases and condensable organics in each filter cell
  • Pleated filter design in rigid, deep frames optimizes active component surface area for maximum utilization and efficiency
  • Low pressure drop enables serial filter layout and multiple levels of protection
  • Interstack sample ports and seriel filter arrangement allow filter performance monitoring without jeopardizing photoresist or exposed optical surfaces
 
Vaporsorb™ CSP-32 Chemical Air Filters

 


Contaminant		Filter
Capture		Removal
Efficiency		Typical
Life
Bases
(e.g., NH3, NMP, Amines)		Excellent>99%>2 years**
Acids and acid forming species
(e.g., HCl, NHNO2, H2SO2, SO2)		Excellent>99%>2 years**
Condensable organics*
(e.g., Toluene, HMDSO, PGMEA)		Excellent>99%>2 years**
*Boiling point >150°C and/or molecular weight >120
**Lifetimes are given for 99% removal efficiency (RE). Running to 90% RE yields much higher lifetimes.
Based on typical cleanroom AMC levels: acids </=1 ppb; bases </=10 ppb and condensable organics
</=20 ppb